Load Cell Line

Module for loading the cell production system with first-class wafers. For this purpose, the wafers are checked contact-free and on-the-fly for the requisite quality criteria (standard inspection of μ-crack, TTV and geometry) and removed from the process where required.

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The modular design consisting of Multi Lane Loader, Metrology and Cell Diverter allows optimum adaptation of the Load Cell Line to throughput, track number and space requirements. For the following cell process, the wafers are either transferred from one or two feed-in tracks onto ten tracks or from one track onto five tracks.

To accommodate higher quality control demands, additional inspection options can be added to the systems (hole and crack recognition, surface measurement, lifetime and resistance measurement).

  • Quality control prior to process start
  • Highest throughputs of up to 7600 wafers per hour
  • Suitable for process systems of up to ten tracks
  • Breakage removal prior to the metrology systems