The modular design consisting of Multi Lane Loader, Metrology and Cell Diverter allows optimum adaptation of the Load Cell Line to throughput, track number and space requirements. For the following cell process, the wafers are either transferred from one or two feed-in tracks onto ten tracks or from one track onto five tracks.
To accommodate higher quality control demands, additional inspection options can be added to the systems (hole and crack recognition, surface measurement, lifetime and resistance measurement).
