Chemical Mechanical Polishing
The novel large substrate SCHMID chemical mechanical polishing (CMP) line has emerged out of the semiconductor world into printed PCB manufacturing as a critical step for next generation multi-layer boards and substrates. For achieving global surface polishing of plated copper with outstanding uniformity, an always well-defined form factor of the dielectric as well as copper lines, planes and vias is achieved.
![](https://schmid-group.com/app/uploads/2023/08/schmid-group-cmp-intro-808x1024.png)
Details
The Oscar type of polishing setup achieves fastest planarization with minimal dishing for all kinds of copper-crystal structures. Along with the SCHMID process know how CMP delivers an optimal polishing process resulting in a perfect synergy between uniformity and removal rate.
In particular, in new processes like embedded traces, HAR via filling or mSAP/SAP, CMP is a key to high yield and access to new low DK epoxy materials.
The CMP as a part of the SCHMID embedded trace technology supports all requirements for industry 4.0. Different interfaces to customers MES are available. The web-based HMI allows to run and control the system from different devices.
![](https://schmid-group.com/app/uploads/2023/08/schmid-group-cmp-details-1024x683.jpg)
Technical data
Head: Ø 930 mm, 30-100 rpm, max. 1450 kg, ±15° swing range @ 0-5 rpm
Platen: Ø 1300 mm, 30-100 rpm with cooling structure
Pumps: 2 slurry pumps for separate slurry supply, 0,980 l/min each
Loading & Unloading: manually, dry-in/wet-out
Conditioner: Swing arm type nylon brush
Control: PLC & Touch Screen
Structure: Simple, robust and high rigidity
High uniformity: NU < 10 %
Repeatability: WTWNU < 7 %
Planarisation factor: ~ 2
Removal rate: ~3μm/min
Dishing: <2μm
Working size: Max. 915 mm (36 inch) Ø
Dimensions: 2600x2700x2500 mm (WxDxH)
![](https://schmid-group.com/app/uploads/2023/07/schmid-contact-1024x768.jpg)
Contact
We look forward to getting to know you!
Simply select your region and leave us a message.
EUROPE
CHINA
Tracy Xie
xie.tr@schmid-group.com
TAIWAN
Johnny Tseng
tseng.jo@schmid-group.com
KOREA
Jaho Kim
kim.jh@schmid-group.com
REST OF ASIA
AMERICA