DES InfinityLine

Details

Developing

A typical inner layer line starts with a development process for inner layers. Mechanical antifoam-device such as the precise dosing of undiluted and diluted antifoam chemistry of 100 ml/H avoids negative effects to the production panels and minimize the yield loss. Furthermore, an oscillation spray manifold with double sided drive for a uniform and smart oscillation with less wear out, spray pipes with 4-fold staggered nozzle arrangement and a precise control of the developer concentration by conductivity in the post developer ensures best developing results.

High etching quality

The new developed spray manifold with 6-fold staggered and extended nozzle arrangement with a perfect spray pressure distribution and the large sliding door at the etching modules for best accessibility to the module are just a few innovations of the InfinityLine etching module. Vacuum etching of particularly fine structures, for increasing the standard distribution and improving the etching factor. Precise etching results and a more uniform spraying pattern are guaranteed.

Innovative filter technology for stripping processes

The entire stripping solution is cleaned via the filter system before being returned to the pump sump. Depending on the different type of resist, a cyclone filter system or a cyclone and drum filter combination can be used.